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- Title
Substrate effects on the CVD growth of MoS<sub>2</sub> and WS<sub>2</sub>.
- Authors
Yin, Hang; Zhang, Xudong; Lu, Jiangwei; Geng, Xuemin; Wan, Yanfen; Wu, Mingzai; Yang, Peng
- Abstract
Chemical vapor deposition (CVD)-grown 2D materials like MoS2 and WS2 have been widely used for research and application. Here, we study substrates' effects on CVD-grown MoS2 and WS2. The morphology, crystalline quality and optical properties have been modified while changing substrates, which can be derived from lattice matching between 2D materials and substrate, defect/impurities on the interface and conductance/transparency of different substrates. The results provide suggestion for further study in CVD growth of 2D materials and device fabrications.
- Subjects
CHEMICAL vapor deposition; OPTICAL properties
- Publication
Journal of Materials Science, 2020, Vol 55, Issue 3, p990
- ISSN
0022-2461
- Publication type
Article
- DOI
10.1007/s10853-019-03993-9