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- Title
Obtaining TiN Coatings by Reactive Anodic Evaporation of Titanium in a Gas Discharge with a Self-Heated Hollow Cathode.
- Authors
Men'shakov, A. I.; Emlin, D. R.
- Abstract
We propose a method for obtaining TiN coatings by reactive anodic evaporation of titanium using a high-current (30 A) discharge with a self-heated hollow cathode in an Ar + N2 gas mixture. The optical spectral analysis shows that the gas-discharge plasma contains a large amount of activated titanium, while the fraction of singly charged metal ions supplied from the plasma to substrate reaches up to 70%. Titanium coatings with 2-μm thickness and up to 24-GPa hardness were obtained at a nitrogen flow rate of 5 cm3/min. The rate of TiN deposition at a distance of 7 cm from the vapor source amounted to ~4 μm/h.
- Subjects
ELECTRIC discharges; TITANIUM; ANODIC oxidation of metals; TITANIUM nitride; SURFACE coatings; GLOW discharges; GAS mixtures
- Publication
Technical Physics Letters, 2021, Vol 47, Issue 7, p511
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S1063785021050254