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- Title
New Cluster Secondary Ions for Quantitative Analysis of the Concentration of Boron Atoms in Diamond by Time-of-Flight Secondary-Ion Mass Spectrometry.
- Authors
Drozdov, M. N.; Drozdov, Yu. N.; Lobaev, M. A.; Yunin, P. A.
- Abstract
A new approach to quantitative analysis of the concentration of boron atoms in diamond using secondary- ion mass spectrometers with time-of-flight mass analyzers is proposed. Along with the known boron-containing lines (B, BC, BC2), many lines related to cluster secondary ions BCN have been found in the mass spectrum; their intensity increases by one or two orders of magnitude when Bi3 probe ions are used. Lines BC4, BC6, BC2, and BC8 have the highest intensity (in the descending order); when they are summed, the sensitivity increases by an order of magnitude in comparison with the known mode of detecting BC2. The parameters of the boron δ-layer in single-crystal diamond films grown under optimal conditions have been measured to be unprecedented: the δ-layer width is about 2 nm, and the concentration is 6.4 × 1020 cm-3 (the boron concentrations for doped and undoped diamonds differ by four orders of magnitude).
- Subjects
BORON; DIAMOND crystals; SECONDARY ion mass spectrometry; TIME-of-flight mass spectrometry; QUANTITATIVE research; DIAMOND thin films
- Publication
Technical Physics Letters, 2018, Vol 44, Issue 4, p297
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S106378501804003X