Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleModeling spray/puddle dissolution processes for deep-ultraviolet acid-hardened resists.AuthorsHutchinson, John M.; Das, Siddhartha; Qi-De Qian; Gaw, Henry T.PublicationOptical Engineering, 1993, Vol 32, Issue 10, p2395ISSN0091-3286Publication typeArticleDOI10.1117/12.145968