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- Title
Effect of pressure on nonlinear dynamics and instability of electrically actuated circular micro-plates.
- Authors
Sajadi, Banafsheh; Alijani, Farbod; Goosen, Hans; van Keulen, Fred
- Abstract
Characterization of nonlinear behavior of micro-mechanical components in MEMS applications plays an important role in their design process. In this paper, nonlinear dynamics, stability and pull-in mechanisms of an electrically actuated circular micro-plate subjected to a differential pressure are studied. For this purpose, a reduced-order model based on an energy approach is formulated. It has been shown that nonlinear dynamics of an electrically actuated micro-plate, in the presence of differential pressure, significantly differs from those under purely electrostatic loads. The micro-plate may lose stability upon either saddle-node or period-doubling bifurcations. It has also been found that in the presence of a differential pressure, increasing the DC or AC voltages may surprisingly help to stabilize the motion of the micro-plate.
- Subjects
HIGH pressure (Technology); NONLINEAR dynamical systems; STABILITY (Mechanics); MICROPLATES; MICROMECHANICS; DIFFERENTIAL pressure flowmeters
- Publication
Nonlinear Dynamics, 2018, Vol 91, Issue 4, p2157
- ISSN
0924-090X
- Publication type
Article
- DOI
10.1007/s11071-017-4007-y