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- Title
Methods for investigating thin dielectric films in the millimeter range.
- Authors
Vlasov, S.; Parshin, V.; Serov, E.
- Abstract
n original method based on determining the characteristics of open Fabry-Perot resonator modes with different polarizations is proposed for measuring parameters of dielectric plates and films with a thickness smaller than λ/2 in the millimeter and submillimeter wavelength ranges. This method is used for determining the refractive index and tanδ, as well as the thickness of films made of isotropic materials. For anisotropic films of known thickness, the method makes it possible to measure the permittivity tensor components. Popular film materials such as Teflon (polytetrafluoroethylene, PTFE), lavsan (Mylar, polyethyleneterephthalate, PETP), and polyamide with a minimal thickness of ∼5 μm are investigated. Appreciable anisotropy of roll film materials and the dependence of the dielectric properties on the thickness, which is associated with manufacturing technology, are revealed. The dependence of the refractive index and tanδ on the air humidity is investigated
- Subjects
ELECTRIC properties of thin films; FABRY-Perot interferometers; ELECTRIC resonators; THICKNESS measurement; ANISOTROPY; PERMITTIVITY; PHTHALATE esters; POLYIMIDES
- Publication
Technical Physics, 2010, Vol 55, Issue 12, p1781
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/S1063784210120121