We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
A Detailed Investigation of Radicals and Ions in ECR Methane/Argon Microwave Discharge.
- Authors
Pokorný, Petr; Mišina, Martin; Novotný, Michal; Fitl, Přemysl; Vlček, Jan; Musil, Jindřich; Marešová, Eva; Bulíř, Jiří; Lančok, Jan
- Abstract
In this work, we focus on study of the formation and behavior of molecules, radicals, and ions in ECR discharge in a mixture of argon and methane. Discharge properties are studied at various conditions; total gas flow (0-50 sccm), absorbed microwave power (0-900 W) and the partial pressure of methane (0-1.2 Pa). Neutral mass spectrometry does not reveal the presence of radical CH5 commonly described in literature. Spectra show the presence of atomic hydrogen H and especially H2 molecules. The number of CH4+ and CH3+ species shows that the amount of CH4+ in areas power up to 350 W is high, but with further increase of the power their amount decreases. With the increasing power the CH3+ ions are more intensively generated. The obtained data helps optimize process conditions for the fabrication of diamond and DLC thin films.
- Subjects
MOLECULES; ARGON; METHANE; MICROWAVE acoustic materials; PRESSURE
- Publication
Plasma Processes & Polymers, 2016, Vol 13, Issue 10, p970
- ISSN
1612-8850
- Publication type
Article
- DOI
10.1002/ppap.201500221