Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleMicromachining of crosslinked PTFE by direct photo-etching using synchrotron radiation.AuthorsYamaguchi, Daichi; Katoh, Takanori; Sato, Yasunori; Ikeda, Shigetoshi; Hirose, Masaoki; Aoki, Yasushi; Iida, Minoru; Oshima, Akihiro; Tabata, Yoneho; Washio, MasakazuPublicationMacromolecular Symposia, 2002, Vol 181, Issue 1, p201ISSN1022-1360Publication typeArticleDOI10.1002/1521-3900(200205)181:1<201::AID-MASY201>3.0.CO;2-M