Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleAdvanced silicon microstructures, sensors, and systems.AuthorsPaul, Oliver; Gaspar, Joao; Ruther, PatrickPublicationIEEJ Transactions on Electrical & Electronic Engineering, 2007, Vol 2, Issue 3, p199ISSN1931-4973Publication typeArticleDOI10.1002/tee.20155