Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitlePressure sensing by electrical admittance measurement of a comb-drive actuator.AuthorsAyano, Kenjiro; Hashiguchi, GenPublicationIEEJ Transactions on Electrical & Electronic Engineering, 2007, Vol 2, Issue 3, pxxvISSN1931-4973Publication typeArticleDOI10.1002/tee.20178