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- Title
Phase-Control Enabled Superior Mechanical and Electrical Properties of Nanocrystalline Tungsten-Molybdenum Thin Films.
- Authors
Martinez, G.; Ramana, C. V.
- Abstract
The authors report on the design and stabilization of the mechanically hard and electrically resistive β-phase W-Mo nanocrystalline thin films at room-temperature ( RT). The W-Mo films are deposited under different deposition temperatures in the range of Ts = RT-30 °C. Structural analyses indicate that, as deposited at RT, the W-Mo films crystallize in the metastable β-phase, while those deposited at higher Ts (100-300 °C) exhibit the thermodynamically stable α-phase. The phase-effect is significant on the mechanical characteristics; superior hardness ( H); and modulus of elasticity ( Er) are found in β-than in α-phase W-Mo films. At the β-to- α phase transformation, significant reduction occurs in H (40 → 25 GPa) and Er (275 → 225 GPa) coupled with a reduction in electrical-resistivity (320 → 180 µΩ-cm). Their findings and the phase-mechanical-electrical property correlation established may provide further possibilities to design and tailor the performance of W-based thin films for future electronic and electromechanical device applications.
- Subjects
TUNGSTEN-molybdenum alloys; THIN films; STRUCTURAL analysis (Engineering)
- Publication
Advanced Engineering Materials, 2017, Vol 19, Issue 11, pn/a
- ISSN
1438-1656
- Publication type
Article
- DOI
10.1002/adem.201700354