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- Title
Experimental investigation of nonlocality effects in the electron energy spectrum in an electronegative gas.
- Authors
Ivanov, V. V.; Klopovskii, K. S.; Lopaev, D. V.; Muratov, E. A.; Rakhimov, A. T.; Rakhimova, T. V.
- Abstract
The nonlocality of the electron energy distribution function (EEDF) in a dc discharge in oxygen is observed experimentally. A method is developed for measuring the isotropic part of the EEDF in a lowtemperature plasma of electronegative gases. The radial dependence of the EEDF and the radial distributions of the electron density, the average electron energy, and the potential are determined.
- Subjects
ELECTRON distribution; GASES
- Publication
JETP Letters, 1996, Vol 63, Issue 7, p537
- ISSN
0021-3640
- Publication type
Article
- DOI
10.1134/1.567062