Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleThe effect of nitrogen incorporation on surface properties of silicon oxynitride films.AuthorsHong, Jongin; Kim, Yunseok; Paik, Hanjong; No, Kwangsoo; Lukes, Jennifer R.PublicationPhysica Status Solidi - Rapid Research Letters, 2009, Vol 3, Issue 1, p25ISSN1862-6254Publication typeArticleDOI10.1002/pssr.200802234