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- Title
Digital image acquisition in scanning electron microscopy.
- Authors
Le Floch, H.; Franceschi, J.-L.; Gouraud, T.; Launay, P.
- Abstract
Digital image acquisition is of great interest in SEM, as can be proven by the number of ways in which images can be improved by processing with this technique ( Desai and Reimer 1985, Hawkes 1981). In the case of the system described here, this interest is enlarged by the facility of storage and retrieval of images. In addition, a digital image becomes the only quantitative result when the 'MEBIS' (Microscope Electronique à Balayage In Situ)is used as an automatic control tool whithin an industrial production line ( Franceschi and Le Floch 1985). This paper describes a system for acquisition, storage and processing of the images given by 'MEBIS', or other SEM if the scanning system includes a remote command. Software for preliminary processing for local representation is presented. The main advantages of this system are its ease of use and its compactness; it is developed around the familiar and low-cost Apple IIe microcomputer, presented in a portable version including a 5 video screen and a single disk drive in a ruggedized housing.
- Publication
Scanning, 1987, Vol 9, Issue 1, p26
- ISSN
0161-0457
- Publication type
Article
- DOI
10.1002/sca.4950090105