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- Title
Fabricating Silicon Resonators for Analysing Biological Samples.
- Authors
Kumemura, Momoko; Pekin, Deniz; Menon, Vivek Anand; Van Seuningen, Isabelle; Collard, Dominique; Tarhan, Mehmet Cagatay
- Abstract
The adaptability of microscale devices allows microtechnologies to be used for a wide range of applications. Biology and medicine are among those fields that, in recent decades, have applied microtechnologies to achieve new and improved functionality. However, despite their ability to achieve assay sensitivities that rival or exceed conventional standards, silicon-based microelectromechanical systems remain underutilised for biological and biomedical applications. Although microelectromechanical resonators and actuators do not always exhibit optimal performance in liquid due to electrical double layer formation and high damping, these issues have been solved with some innovative fabrication processes or alternative experimental approaches. This paper focuses on several examples of silicon-based resonating devices with a brief look at their fundamental sensing elements and key fabrication steps, as well as current and potential biological/biomedical applications.
- Subjects
RESONATORS; MICROELECTROMECHANICAL systems; MICROTECHNOLOGY; ELECTROMECHANICAL technology; ACTUATORS
- Publication
Micromachines, 2021, Vol 12, Issue 12, p1546
- ISSN
2072-666X
- Publication type
Article
- DOI
10.3390/mi12121546