Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleFabrication of a microelectromechanical system mirror array and its drive electrodes for low electrical interference in wavelength-selective switches.AuthorsSakata, Tomomi; Usui, Mitsuo; Uchiyama, Shingo; Shimoyama, Nobuhiro; Kodate, Junichi; Ishii, Hiromu; Matsuura, Tohru; Shimokawa, Fusao; Sato, YasuhiroPublicationIEEJ Transactions on Electrical & Electronic Engineering, 2011, Vol 6, Issue 4, p384ISSN1931-4973Publication typeArticleDOI10.1002/tee.20672