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- Title
Full-field X-ray reflection microscopy of epitaxial thin-films.
- Authors
Laanait, Nouamane; Zhan Zhang; Schlepütz, Christian M.; Vila-Comamala, Joan; Highland, Matthew J.; Fenter, Paul
- Abstract
Novel X-ray imaging of structural domains in a ferroelectric epitaxial thin film using diffraction contrast is presented. The full-field hard X-ray microscope uses the surface scattering signal, in a reflectivity or diffraction experiment, to spatially resolve the local structure with 70 nm lateral spatial resolution and subnanometer height sensitivity. Sub-second X-ray exposures can be used to acquire a 14 mm 14 mm image with an effective pixel size of 20 nm on the sample. The optical configuration and various engineering considerations that are necessary to achieve optimal imaging resolution and contrast in this type of microscopy are discussed.
- Subjects
X-ray diffraction; X-ray microscopy; THIN films; MATERIALS science; LIGHT scattering
- Publication
Journal of Synchrotron Radiation, 2014, Vol 21, Issue 6, p1252
- ISSN
0909-0495
- Publication type
Article
- DOI
10.1107/S1600577514016555