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- Title
In‐Plane AlN‐Based Actuator: Toward a New Generation of Piezoelectric MEMS.
- Authors
Bespalova, Kristina; Nieminen, Tarmo; Gabrelian, Artem; Ross, Glenn; Paulasto‐Kröckel, Mervi
- Abstract
This article, titled "In-Plane AlN-Based Actuator: Toward a New Generation of Piezoelectric MEMS," was published in Advanced Electronic Materials. The article acknowledges several errors in the original manuscript, including an inverted key in Figure 8 and errors in the caption for Figure 9. Additionally, the reference for entry [32] in Table 1 is incorrect and should be replaced with the correct reference. Furthermore, the units for the length of the actuator in Table 3 and Table 4 should be "µm" instead of "nm." The authors assure readers that these errors do not affect the conclusions of the report and apologize for any inconvenience caused.
- Subjects
ACTUATORS; ELECTRONIC materials; ELECTRONIC publishing; AUTHOR-reader relationships; APOLOGIZING
- Publication
Advanced Electronic Materials, 2023, Vol 9, Issue 12, p1
- ISSN
2199-160X
- Publication type
Correction Notice
- DOI
10.1002/aelm.202300721