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- Title
A Study of the Mechanical Effects in the Coupling Process of Excimer Laser Electrochemical Etching.
- Authors
LONG, Y.-H.; XIE, Y.-J.; XIONG, L.-C.; YANG, X.-Q.; SHI, T.-L.
- Abstract
To explore further the characteristic of mechanical effects in the process of laser-induced electrochemical etching, the experiments of micromachining silicon by laser-induced electrochemical etching are carried out. This paper adopts a KrF excimer laser as the light source and uses KOH solution as the electrolyte. By experiments and theoretical analysis, mechanical effects were studied in the process of high-energy and short-pulse laser electrochemical etching; the removal mechanism of brittle materials by mechanical effects was analysed. The results show that mechanical effect is significant when high-energy and short-pulse laser interacting with substances in solution, and mechanical effects enhance the etching of brittle materials. By the study of mechanical effects when short-pulse excimer laser interacting with matter in liquid, the mechanism of laser electrochemical process was further understood.
- Subjects
MAGNETIC coupling; ELECTROCHEMICAL analysis; LASER engraving; EXCIMER lasers; ELECTROLYTES; SOLUTION (Chemistry)
- Publication
Lasers in Engineering (Old City Publishing), 2015, Vol 30, Issue 1/2, p91
- ISSN
0898-1507
- Publication type
Article