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- Title
Laser-Induced Self-Organized Periodic Nano-Hole/Nano-Ridge Structures on the Surface of Silicon Produced with a Tightly Focused Femtosecond Pulse Laser Beam.
- Authors
J.T. XU; M. ZHOU; D.Q. YUAN; N.F. REN; D.Q. LU
- Abstract
Periodic nano-hole, nano-ridge and ripple structures on silicon bulk were formed by a scanning tightly focused beam of the femtosecond laser with wavelength of 800 nm, a repetition rate of 1 kHz and the pulse length of 130 fs in air. The periodic nano-hole structures induced by one line scan which focus with a 20x focusing objective lens (NA = 0.4) is reported. Investigating the relationship between the width of structures and the speed of line scanning provided knowledge of the evolvement of the nano-hole and nano-ridge structures.
- Subjects
LASER beams; NANOSTRUCTURED materials; SILICON surfaces; FEMTOSECOND pulses; LASER optical pulse; FEMTOSECOND lasers
- Publication
Lasers in Engineering (Old City Publishing), 2013, Vol 25, Issue 5/6, p387
- ISSN
0898-1507
- Publication type
Article