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- Title
Novel high sensitivity accelerometer based on a microfiber loop resonator.
- Authors
Hou, Changlun; Wu, Yu; Zeng, Xu; Zhao, Shuangshuang; Zhou, Qiaofen; Yang, Guoguang
- Abstract
An optical accelerometer with a bulk-micromachined silicon proof mass and a microfiber loop resonator (MLR) sensor was developed. The MLR was fixed on the surface of the cantilever beam. The proof mass and cantilever beam were fabricated with a two-mask process. An accelerometer with a range of ±20 gand output sensitivity 624.7 mVgwas fabricated. The design, simulation, fabrication, and preliminary results are presented.
- Subjects
ACCELEROMETERS; RESONATORS; MICROMACHINING; SILICON; GIRDERS; CANTILEVERS; SURFACES (Technology); SIMULATION methods &; models
- Publication
Optical Engineering, 2010, Vol 49, Issue 1, p014402
- ISSN
0091-3286
- Publication type
Article