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- Title
Formation of nanoparticles in a thin metal film on a dielectric substrate under the action of a nanosecond pulsed high-power ion beam.
- Authors
Kovivchak, V.; Burlakov, R.; Panova, T.; Davletkil’deev, N.
- Abstract
We have studied the formation of nanoparticles in a thin metal film-dielectric substrate system under the action of a high-power nanosecond pulsed proton-carbon ion beam. Data on the particles formed from 5-to 60-nm-thick aluminum and nickel films on ST-50 Sitall (glass-ceramic composite) substrates are presented. Possible mechanisms of nanoparticle formation in ion-irradiated metal films on dielectric substrates are considered.
- Subjects
METALLIC films; NANOPARTICLES; DIELECTRICS; ION bombardment; ALUMINUM films
- Publication
Technical Physics Letters, 2008, Vol 34, Issue 4, p358
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S1063785008040251