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- Title
Photolithographic Approaches for Fabricating Highly Ordered Nanopatterned Arrays.
- Authors
Xiaoru Li; Guojun Song; Zhi Peng; Xilin She; Jianjiang Li; Jin Sun; Di Zhou; Peidong Li; Zengjun Shao
- Abstract
In this work, we report that large area metal nanowire and polymer nanotube arrays were successfully patterned by photolithographic approach using anodic aluminum oxide (AAO) templates. Nanowires were produced by electrochemical deposition, and nanotubes by solution-wetting. The highly ordered patterns of nanowire and nanotube arrays were observed using scanning electron microscopy (SEM) and found to stand free on the substrate. The method is expected to play an important role in the application of microdevices in the future.
- Subjects
PHOTOLITHOGRAPHY; NANOWIRES; NANOTUBES; POLYMERS; ELECTROLYTIC oxidation; ALUMINUM oxide; SUBSTRATES (Materials science); SCANNING electron microscopy
- Publication
Nanoscale Research Letters, 2008, Vol 3, Issue 12, p521
- ISSN
1931-7573
- Publication type
Article
- DOI
10.1007/s11671-008-9190-9