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- Title
Ultrahigh-Vacuum Third-Order Spherical Aberration ~Cs! Corrector for a Scanning Transmission Electron Microscope.
- Authors
Kazutaka Mitsuishi; Masaki Takeguchi; Yukihito Kondo; Fumio Hosokawa; Kimiharu Okamoto; Takumi Sannomiya; Madoka Hori; Takeshi Iwama; Muneyuki Kawazoe; Kazuo Furuya
- Abstract
Initial results from an ultrahigh-vacuum ~UHV! third-order spherical aberration ~Cs! corrector for a dedicated scanning transmission electron microscopy, installed at the National Institute for Materials Science, Tsukuba, Japan, are presented here. The Cs corrector is of the dual hexapole type. It is UHV compatible and was installed on a UHV column. The Ronchigram obtained showed an extension of the sweet spot area, indicating a successful correction of the third-order spherical aberration Cs. The power spectrum of an image demonstrated that the resolution achieved was 0.1 nm. A first trial of the direct measurement of the fifth-order spherical aberration C5 was also attempted on the basis of a Ronchigram fringe measurement.
- Publication
Microscopy & Microanalysis, 2006, Vol 12, Issue 6, p456
- ISSN
1431-9276
- Publication type
Article
- DOI
10.1017/S1431927606060661