Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.Title20.4: Activation of Doped Silicon Film Using Semiconductor Blue Light Diode Laser Annealing.AuthorsYang, Y.; Kinoshita, M.; Okuno, T.; Hashizume, M.; Saito, K.; Sawai, T.; Gotoh, J.; Sugimoto, S.PublicationSID Symposium Digest of Technical Papers, 2023, Vol 54, p157ISSN0097-966XPublication typeArticleDOI10.1002/sdtp.16251