Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleComparison with film substrates of polyimide and Ni for cantilevered magnetic actuators.AuthorsYokota, Chikako; Ishiyama, Kazushi; Arai, Ken IchiPublicationIEEJ Transactions on Electrical & Electronic Engineering, 2007, Vol 2, Issue 4, p436ISSN1931-4973Publication typeArticleDOI10.1002/tee.20185