Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleThe application of low-voltage scanning electron microscopy for the analysis of VLSI devices.AuthorsWoodward, M.; Jones, D. R.PublicationScanning, 1989, Vol 11, Issue 4, p199ISSN0161-0457Publication typeArticleDOI10.1002/sca.4950110407