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- Title
Electrostatic repulsion-based graphene multi-cavity array resonators for molecular-level detection.
- Authors
Zhang, Shuai; Mei, Linyu; Bi, Kaixi; Guo, Miaoli; Li, Qiannan; Han, Shuqi
- Abstract
Resonant sensors offer high stability and sensitivity. Conventional silicon-based resonant sensors focused on micro sizes and kHz-level resonant frequencies (fre). Graphene, a two-dimensional material with remarkable electromechanical response efficiency, allows for the fabrication of resonators with MHz-level resonant frequencies, exhibits exceptional sensitivity to gases. The current single-cavity structure suffers from limitations such as low-quality factors, small sensitive area, and structural defects. This paper introduces a graphene multi-cavity array resonant (GMCAR) structure and a driving detection scheme based on electrostatic repulsion. The sensor achieves a fundamental fre of 126.16 MHz and a quality factor (Q) up to 135 at ambient temperature and pressure. Moreover, this sensor successfully detects nitrogen dioxide (NO2) gas. The fre decreases approximately by 0.4 kHz, indicating the detection of NO2 gas at a molecular level, with an estimated mass of 0.6 fg. The second vibration mode of the sensor is also detected and used for gas sensing.
- Subjects
RESONATORS; GRAPHENE; QUALITY factor; NITROGEN dioxide; DETECTORS
- Publication
Journal of Materials Science: Materials in Electronics, 2024, Vol 35, Issue 7, p1
- ISSN
0957-4522
- Publication type
Article
- DOI
10.1007/s10854-024-12274-4