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- Title
Synthesis of Intermetallic Phases in the Nb–Cd and Mo–Cd Systems by Ion-Plasma Sputtering and Atomic Layer Deposition of Metals in Vacuum.
- Authors
Volodin, V. N.; Tuleushev, Yu. Zh.; Zhakanbaev, E. A.; Trebukhov, S. A.; Burabaeva, N. M.; Nitsenko, A. V.
- Abstract
Niobium and molybdenum dicadmides (NbCd2 and MoCd2) have been synthesized using ion-plasma sputtering and codeposition of ultrafine niobium and cadmium or molybdenum and cadmium particles on unheated substrates at a Cd concentration near 66 at % in the film, without initiating reactions leading to the formation of these compounds. Their composition, structure, and unit-cell parameters have been determined by X-ray diffraction and transmission electron microscopy. The synthesized niobium and molybdenum dicadmides can be described by tetragonal unit cells with parameters a = 0.84357 nm and c = 0.54514 nm for the former and a = 0.78231 nm and c = 0.77039 nm for the latter, in which pairs of cadmium atoms reside on lateral faces.
- Subjects
MOLYBDENUM; ATOMIC layer deposition; MOLYBDENUM ions; VACUUM deposition; NIOBIUM; TRANSMISSION electron microscopy; INTERMETALLIC compounds
- Publication
Inorganic Materials, 2020, Vol 56, Issue 1, p28
- ISSN
0020-1685
- Publication type
Article
- DOI
10.1134/S0020168520010185