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- Title
SCANNING MICROWAVE IMPEDANCE MICROSCOPY: OVERVIEW AND LOW TEMPERATURE OPERATION.
- Authors
Antoniou, Nicholas
- Abstract
The article provides an overview of scanning microwave impedance microscopy (sMIM), a near-field technique for probing electrical properties of materials with nanoscale lateral resolution. Topics include advantages include imaging floating dielectrics and sub-surface features without the need for sample grounding; and principles of operation of sMIM, gives an overview of the low-temperature configuration including use in semiconductor failure analysis, and quantum computing research.
- Subjects
CRYOMICROSCOPY; SCIENTIFIC apparatus &; instruments; QUANTUM spin Hall effect; QUANTUM well devices; MICROWAVES; COMPLEMENTARY metal oxide semiconductors
- Publication
Electronic Device Failure Analysis, 2023, Vol 25, Issue 1, p9
- ISSN
1537-0755
- Publication type
Article
- DOI
10.31399/asm.edfa.2023-1.p009