Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleNanofabrication: the unsung hero in enabling advances in nanophotonics.AuthorsChengfeng, Pan; Shutao, Zhang; Farsari, Maria; Oh, Sang Hyun; Yang, Joel K. W.SubjectsNANOPHOTONICS; NANOPORES; NANOFABRICATION; PLASMA-enhanced chemical vapor deposition; ELECTROCHROMIC effectPublicationNanophotonics (21928606), 2023, Vol 12, Issue 8, p1359ISSN2192-8606Publication typeArticleDOI10.1515/nanoph-2023-0217