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- Title
多向复合超声换能器有限元分析与试验.
- Authors
高昌彬; 薛进学; 马文举; 隆志力; 赵 恒
- Abstract
The ultrasonic transduce r is the core actuator of microelectronic packaging technology. In order to solve the problems of low bonding efficiency, uneven bonding surface and insecure bonding point of tradition al on e-- dimensional longitudinal vibration ultrasonic transducer, the finite element model of transducer is established by ANSYS simulation software for modal analysis and harmonic response analysis. A kin d of 40 kHz multi-directional composite sandwich piezoelectric ultrasonic transducer that can realize axial longitudinal vibration, horizontal bending vibration and vertical pitching vibration at the same time is designed. Among them, the piezoelectric part consists of a whole ring and a 1 /4 ring ceramic sheet which can be excited separately. The impedance frequency characteristic curves of longitudinal vibration, bending vibration and pitching vibration of the transducer are obtained by the physical test of the impedance analyzer. The results show that the test values a re basically consistent wit h that of the simulation analysis, and the structural performance parameters meet the bonding requirements, which verify the rationality of the structure.
- Subjects
VIBRATION transducers; MICROELECTRONIC packaging; MODAL analysis; HARMONIC analysis (Mathematics); PIEZOELECTRIC composites; TRANSDUCERS; PIEZOELECTRIC transducers; ULTRASONIC transducers
- Publication
Piezoelectrics & Acoustooptics, 2020, Vol 42, Issue 5, p640
- ISSN
1004-2474
- Publication type
Article
- DOI
10.11977/j.issn.1004-2474.2020.05.013