Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleTopography of Defect Parameters on Si and GaAs Wafers.AuthorsK. Dornich; B. Gründig-Wendrock; T. HahnPublicationAdvanced Engineering Materials, 2004, Vol 6, Issue 7, p598ISSN1438-1656Publication typeArticleDOI10.1002/adem.200400415