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- Title
Structural and photoluminescent properties of TiN thin films.
- Authors
Solovan, M.; Brus, V.; Maryanchuk, P.; Fodchuk, I.; Lorents, V.; Sletov, A.; Sletov, M.; Gluba, M.
- Abstract
Structural and photoluminescent properties of TiN thin films deposited by dc reactive magnetron sputtering are studied. It is found that TiN thin films are polycrystalline with a grain size of ∼15 nm and have a NaCl-type cubic crystal structure with a lattice constant of 0.42 nm. The TiN films under study exhibit photoluminescence in the spectral range h ≈ 2.1-3.4 eV at 300 K.
- Subjects
TIN; THIN films; PHOTOLUMINESCENCE; CRYSTAL structure; LATTICE constants; MAGNETRON sputtering
- Publication
Optics & Spectroscopy, 2014, Vol 117, Issue 5, p753
- ISSN
0030-400X
- Publication type
Article
- DOI
10.1134/S0030400X14110198