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- Title
Ferroelectric Hafnium Oxide Films for In‐Memory Computing Applications.
- Authors
Li, Zhenhai; Wang, Tianyu; Yu, Jiajie; Meng, Jialin; Liu, Yongkai; Zhu, Hao; Sun, Qingqing; Zhang, David Wei; Chen, Lin
- Abstract
Traditional von Neumann architecture is facing severe challenges due to separated physical structure of memory and processing units, which inspires the development of in‐memory computing electronics. Intriguingly, as a kind of complementary metal‐oxide‐semiconducor compatible ferroelectric material, HfO2 is widely studied based on first‐principles calculation in the semiconductor field, showing great potential in constructing emerging electronics. Different structures including ferroelectric diode, ferroelectric field effect transistor, and ferroelectric tunnel junctions based on HfO2 are proposed for in‐memory computing application. Here, this work reviews the progress of HfO2 from materials to devices, including crystal structure, fatigue mechanism, first‐principles calculation, and neuromorphic computing application of HfO2‐based device. This work can provide a reference for the HfO2 ferroelectric device development for next‐generation in‐memory computing applications.
- Subjects
HAFNIUM oxide films; FIELD-effect transistors; FERROELECTRIC materials; FERROELECTRICITY; TUNNEL junctions (Materials science); FERROELECTRIC devices; FERROELECTRIC polymers
- Publication
Advanced Electronic Materials, 2022, Vol 8, Issue 12, p1
- ISSN
2199-160X
- Publication type
Article
- DOI
10.1002/aelm.202200951