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- Title
Improvement of average laser power and beam divergence of a high pulse repetition frequency excimer laser.
- Authors
Uteza, O.; Delaporte, P.; Fontaine, B.; Forestier, B.; Sentis, M.; Tassy, I.; Truong, J.P.
- Abstract
Abstract. We demonstrate that the insertion of ceramic acoustic dampers within an excimer laser cavity produces a large reduction in the amplitude of the residual pressure fluctuations, hence allowing a strong improvement of average laser power and beam divergence at high pulse repetition frequency. Moreover, this technological solution is easy to implement and economical.
- Subjects
EXCIMER lasers; RESIDUAL stresses; HEARING
- Publication
Applied Physics B: Lasers & Optics, 1998, Vol 66, Issue 1, p31
- ISSN
0946-2171
- Publication type
Article
- DOI
10.1007/s003400050353