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- Title
Slot Antenna Integrated Re-Entrant Resonator Based Wireless Pressure Sensor for High-Temperature Applications.
- Authors
Shujing Su; Fei Lu; Guozhu Wu; Dezhi Wu; Qiulin Tan; Helei Dong; Jijun Xiong
- Abstract
The highly sensitive pressure sensor presented in this paper aims at wireless passive sensing in a high temperature environment by using microwave backscattering technology. The structure of the re-entrant resonator was analyzed and optimized using theoretical calculation, software simulation, and its equivalent lump circuit model was first modified by us. Micro-machining and high-temperature co-fired ceramic (HTCC) process technologies were applied to fabricate the sensor, solving the common problem of cavity sealing during the air pressure loading test. In addition, to prevent the response signal from being immersed in the strong background clutter of the hermetic metal chamber, which makes its detection difficult, we proposed two key techniques to improve the signal to noise ratio: the suppression of strong background clutter and the detection of the weak backscattered signal of the sensor. The pressure sensor demonstrated in this paper works well for gas pressure loading between 40 and 120 kPa in a temperature range of 24 °C to 800 °C. The experimental results show that the sensor resonant frequency lies at 2.1065 GHz, with a maximum pressure sensitivity of 73.125 kHz/kPa.
- Subjects
SLOT antennas; MAGNETIC superconductors; ELECTRIC resonators; PRESSURE sensors; HIGH temperature electronics; BACKSCATTERING
- Publication
Sensors (14248220), 2017, Vol 17, Issue 9, p1963
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s17091963