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- Title
X-ray scattering by porous silicon modulated structures.
- Authors
Lomov, A.; Punegov, V.; Karavanskii, V.; Vasil'ev, A.
- Abstract
A multilayered porous structure formed as a result of the anodization of a Si(111)(Sb) substrate in an HF:CHOH (1: 2) solution with a periodically alternating current has been investigated by high-resolution X-ray diffraction. It is established that, despite 50% porosity, a thickness of 30 μm, and significant strain (4 × 10, the porous silicon structure consists mainly of coherent crystallites. A model of coherent scattering from a multilayered periodic porous structure is proposed within the dynamic theory of diffraction. It is shown that the presence of gradient strains of 5 × 10 or higher leads to phase loss upon scattering from porous superlattices and the suppression of characteristic satellites in rocking curves.
- Subjects
X-ray scattering; POROUS silicon; CRYSTAL structure; X-ray diffraction; SOLUTION (Chemistry); THICKNESS measurement; SUPERLATTICES
- Publication
Crystallography Reports, 2012, Vol 57, Issue 2, p185
- ISSN
1063-7745
- Publication type
Article
- DOI
10.1134/S1063774511060162