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- Title
High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles.
- Authors
Nakazawa, Takeshi; Sasián, José; Abraham, Francy K.
- Abstract
We propose a high-speed surface profiler using a modified Fourier transform profilometry (FTP) approach. Our system geometry is different from a conventional profiler in that the fringe-projection lens and the imaging lens are at different heights from a reference plane. FTP computer simulation and experimental data are provided that supports our theoretical development. Our profiler provides a 1σ rms error of about 4 μm for an integrated circuit chip sample in an area of 14 mm × 6.5 mm with a 0.13 second data acquisition time. It is shown that our theoretical derivation is suitable for a micrometer scale object measurement.
- Subjects
OPTICAL images; FOURIER transforms; OPTICAL engineering; COMPUTER simulation; DATA acquisition systems; OPTICAL communications
- Publication
Optical Engineering, 2011, Vol 50, Issue 5, p053603
- ISSN
0091-3286
- Publication type
Article
- DOI
10.1117/1.3574399