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- Title
PEEM and SXES Characterization on the Surface and Interface of the Transition-Metal/SiC System.
- Authors
Labis, Joselito; Ohi, Akihiko; Kamezawa, Chihiro; Fujiki, Toshinori; Yoshida, Kenichi; Hirai, Masaaki; Kusaka, Masahiko; Iwami, Motohiro
- Abstract
The Si L[sub 2,3] and C K soft X-ray emission spectra of the interface of the Ti(50 nm)/4H-SiC(substrate) system, thermally annealed from 800°C to 1000°C and characterized by soft X-ray emission spectroscopy (SXES), revealed the formation of a reacted region composed of silicides with Ti[sub 5]Si[sub 3] as the majority formed species and carbides in TiC-like bonding. Also, the photoemission electron microscopy (PEEM) imaging of Ti(10 nm) film on 3C-SiC surface during in situ heat treatment showed the formation of island structures (in ring clusters) at ∼ 800° C.
- Subjects
INTERFACES (Physical sciences); EMISSION spectroscopy; TRANSITION metals
- Publication
Surface Review & Letters, 2002, Vol 9, Issue 1, p313
- ISSN
0218-625X
- Publication type
Article
- DOI
10.1142/S0218625X02002300