Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleA Low-Noise, Two-Channel STEM EBIC Metrology System.AuthorsHubbard, William A.; Mecklenburg, Matthew; Regan, B. C.PublicationMicroscopy & Microanalysis, 2022, Vol 28, p794ISSN1431-9276Publication typeAbstractDOI10.1017/S1431927622003580