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- Title
The Determination of the Efficiency of Energy Dispersive X-Ray Spectrometers by a New Reference Material.
- Authors
Marco Alvisi; Markus Blome; Michael Griepentrog; Vasile-Dan Hodoroaba; Peter Karduck; Marco Mostert; Michele Nacucchi; Mathias Procop; Martin Rohde; Frank Scholze; Peter Statham; Ralf Terborg; Jean-Francois Thiot
- Abstract
A calibration procedure for the detection efficiency of energy dispersive X-ray spectrometers (EDS) used in combination with scanning electron microscopy (SEM) for standardless electron probe microanalysis (EPMA) is presented. The procedure is based on the comparison of X-ray spectra from a reference material (RM) measured with the EDS to be calibrated and a reference EDS. The RM is certified by the line intensities in the X-ray spectrum recorded with a reference EDS and by its composition. The calibration of the reference EDS is performed using synchrotron radiation at the radiometry laboratory of the Physikalisch-Technische Bundesanstalt. Measurement of RM spectra and comparison of the specified line intensities enables a rapid efficiency calibration on most SEMs. The article reports on studies to prepare such a RM and on EDS calibration and proposes a methodology that could be implemented in current spectrometer software to enable the calibration with a minimum of operator assistance.
- Publication
Microscopy & Microanalysis, 2006, Vol 12, Issue 5, p406
- ISSN
1431-9276
- Publication type
Article
- DOI
10.1017/s1431927606060557