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- Title
Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon.
- Authors
Bestugin, A.; Kirshina, I.; Okin, P.; Filonov, O.
- Abstract
This paper examines the methodic error of a micromechanical pressure sensor with a secondary capacitive transducer, arising in the isotropic model of the elastic properties of a monocrystalline membrane used in engineering design and metrological calculations. We obtain solutions of the Germain-Lagrange equations for anisotropic and isotropic circular membranes, as well as compare the values of their deflections in the both cases. The analysis shows that, under some parameters of the membrane, the output error of the measured value corresponding to the isotropic approximation reaches 7% of the measured pressure values close to its upper limit in the linearity zone of the static characteristics and contributes significantly to the total error of the sensor. This error can be easily compensated by circuit design.
- Subjects
MICROELECTROMECHANICAL systems; MECHATRONICS; MICROASSEMBLING; ISOBARIC processes; INTRA-abdominal hypertension
- Publication
Automation & Remote Control, 2015, Vol 76, Issue 12, p2249
- ISSN
0005-1179
- Publication type
Article
- DOI
10.1134/S0005117915120140