We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
Production of high-quality manganite-based films on an improved VUP-5M magnetron device.
- Authors
Nikolaenko, Yu.; Mukhin, A.; Chaika, V.; Burkhovetskii, V.
- Abstract
The design of an additional thermal and electric shield intended to improve the quality (crystal lattice, thickness uniformity) of deposited films is described. This shield makes it possible to use a more powerful heat source to heat a substrate and to optimize epitaxial film growth. Simultaneously, the shield plays the role of an additional anode, which changes the plasma dynamics in the working space and homogenizes the radial distribution of the neutral particle flux density from a target to a substrate.
- Subjects
MANGANITE; OXIDE minerals; POWDER film; CRYSTAL lattices; PLASMA gases; LATTICE theory
- Publication
Technical Physics, 2010, Vol 55, Issue 8, p1189
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/S1063784210080189