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- Title
Formation of argon fluoride molecules under interaction of an argon plasma flow with potassium fluoride and sulfur hexafluoride vapors.
- Authors
Shuaibov, A. K.; Shimon, L. L.; Shevera, I. V.
- Abstract
The formation of argon fluoride molecules in plasma-dynamic jets of argon-potassium fluoride vapor and argon-sulfur hexafluoride vapor mixtures is investigated. The intensity of the ArF* luminescence band at 193 nm versus the argon and sulfur hexafluoride flow rates, pump power, and distance from the nozzle is studied.
- Subjects
ARGON plasmas; PLASMA electrodynamics; JETS (Fluid dynamics); LUMINESCENCE; MONOCHROMATORS; LIQUID potassium
- Publication
Technical Physics, 2006, Vol 51, Issue 10, p1390
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/S1063784206100240