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- Title
IR Birefringence in Artificial Crystal Fabricated by Anisotropic Etching of Silicon.
- Authors
Astrova, E. V.; Perova, T. S.; Tolmachev, V. A.; Remenyuk, A. D.; Vij, J.; Moore, A.
- Abstract
Periodic structures of deep narrow grooves with vertical walls have been fabricated by liquid anisotropic etching of silicon. It has been shown experimentally that the medium obtained behaves as a negative uniaxial crystal with an optical axis parallel to the wafer plane and exhibits an extremely high optical anisotropy in the mid-IR spectral range. The difference in the effective refractive indices for the ordinary and extraordinary rays, Δn, is about 1.5.
- Subjects
SILICON; SEMICONDUCTORS
- Publication
Semiconductors, 2003, Vol 37, Issue 4, p399
- ISSN
1063-7826
- Publication type
Article
- DOI
10.1134/1.1568458