Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleObservation of low-temperature diffusion of aluminum impurity atoms in hydrogen-implanted siliconAuthorsGorelkinskii, Yu. V.; Mukashev, O. N.; Abdullin, Kh. A.PublicationSemiconductors, 1998, Vol 32, Issue 4, p375ISSN1063-7826Publication typeArticleDOI10.1134/1.1187399