Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleMEMS devices: Progress towards practical applications.AuthorsEsashi, MasayoshiPublicationIEEJ Transactions on Electrical & Electronic Engineering, 2009, Vol 4, Issue 1, p54ISSN1931-4973Publication typeArticleDOI10.1002/tee.20371