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- Title
Modeling Multilayered MEMS-Based Micro-Fluidic Systems.
- Authors
Bhansali, Shekhar; Benjamin, Helen; Upadhyay, Vandana; Okulan, Nihat; Kwang Wook Oh, Nihat; Henderson, H. Thurman; Ahn, Chong H.
- Abstract
This article describes the design, fabrication, and simulation of two micro-electromechanical systems-based micro fluidic systems. The first system, a lab-on-a-chip, enables electrochemical immunoassay-based chemical/biological detection. The second is a micro fluidic bio-impedance sensor. The relevance of fluidic dynamics in micro fluidic channels is discussed in context of fluid paths and misalignments in the channels that appear during multi-level structure integration. Also discussed is the effect of channel dimensions on the flow profile and on performance within the micro-systems.
- Subjects
MICROELECTROMECHANICAL systems; FLUIDIC devices; FLUID dynamics; CHEMICAL detectors; ELECTROMECHANICAL devices; MICROELECTROMECHANICAL systems industry; IMMUNOASSAY
- Publication
JOM: The Journal of The Minerals, Metals & Materials Society (TMS), 2004, Vol 56, Issue 3, p57
- ISSN
1047-4838
- Publication type
Article
- DOI
10.1007/s11837-004-0036-3