Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitlePECVD<sup>TM</sup> Coatings in Industrial Applications.AuthorsSeaman, Walter; Madocks, John; Jochum, ToniPublicationVakuum in Forschung und Praxis, 2012, Vol 24, Issue 2, p31ISSN0947-076XPublication typeArticleDOI10.1002/vipr.201200485